Single-sheet type resist peeling device
Introducing a system that automatically processes each step from stripping, rinsing, to spin drying!
We would like to introduce the "Sheet-Type Resist Stripping Device" that we handle. By simply setting a FOUP or dedicated cassette on the load port, the clean robot automatically transports the workpieces. It is also capable of manufacturing manual development devices. The work materials supported include Si, SiC, GaN, GaAs, InP, ceramics, quartz, resin, glass, SUS plates, and more. 【Specifications (partial)】 ■ Two-stage cup (upper stage: resist, lower stage: rinse) ■ Stripping solution: DMSO/TMAH, polyimide, etc. (independent chamber) ■ Rinse solution: polyimide, etc. ■ Back rinse: DIW, polyimide, reusable liquid, etc. ■ Stripping and rinse solution supply and recovery tank can be built into the device *For more details, please download the PDF or feel free to contact us.
- 企業：LC 洗浄装置事業部
- 価格：Other
